NFPA® 318 Standard for the Protection of Semiconductor Fabrication Facilities 2012 Edition

Chapter 1 Administration
1.1 Scope
1.2 Purpose
1.3 Retroactivity
1.4 Equivalency
1.5 Units
Chapter 2 Referenced Publications
2.1 General
2.2 NFPA Publications
2.3 Other Publications
2.4 References for Extracts in Mandatory Sections
Chapter 3 Definitions
3.1 General
3.2 NFPA Official Definitions
3.3 General Definitions
Chapter 4 Fire Protection
4.1 Automatic Fire-Extinguishing Systems
4.2 Alarm Systems
4.3 Detection Systems
Chapter 5 Ventilation and Exhaust Systems
5.1 Air Supply and Recirculation Systems
5.2 Local Hazardous Chemical Exhaust System
5.3 Local Hazardous Chemical Exhaust System Construction
5.4 General Conditions
5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution
5.6 Hazardous Chemical Exhaust Controls
Chapter 6 Construction
6.1 Classification of Occupancy
6.2 Noncombustible Construction Components
6.3 Fire Resistance Rating
6.4 Electrical Classification
6.5 Emergency Power System
6.6 Occupied Levels of Fabrication Areas
6.7 Pass-Throughs in Existing Exit Access Corridors
6.8 Fabrication Areas
6.9 Vertical Openings
Chapter 7 Chemical Storage and Handling
7.1 Hazardous Chemicals
7.2 Flammable and Combustible Liquid Delivery Systems
7.3 Container Delivery
7.4 Liquid Waste Disposal
7.5 Spill Protection
7.6 Supply Piping
7.7 Welding
7.8 Pyrophoric Liquids
Chapter 8 Hazardous Gas Cylinder Storage and Distribution
8.1 Packaging
8.2 Transport to the Semiconductor Facility
8.3 Distribution Systems
8.4 Silane and Silane/Nontoxic Mixes Storage and Dispensing Areas
8.5 Silane/Toxic Mixes Storage and Dispensing Areas
8.6 Flammable or Toxic Gases
8.7 Vent Headers
8.8 Training
8.9 Treatment Systems.
Chapter 9 Bulk Silane Systems
9.1 Tube Trailer Systems
9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders
Chapter 10 Production and Support Equipment
10.1 General
10.2 Interlocks
10.3 Electrical Design
10.4 Process Liquid Heating Equipment
10.5 Materials of Construction
10.6 Vacuum Pumps
10.7 Hazardous Gas Delivery Systems
10.8 Tools Using Flammable or Combustible Chemicals
10.9 Gas-Detection Systems
10.10 Emergency Alarm System
Chapter 11 Emergency Control Station
11.1 Emergency Control Station
Chapter 12 General Safety Precautions
12.1 Emergency Plan
12.2 Emergency Response Team
12.3 Emergency Drills
Chapter 13 Means of Egress
13.1 Means of Egress
13.2 Service Corridors
Annex A Explanatory Material
Annex B Seismic Protection
Annex C Production and Support Equipment
Annex D Informational References
Index