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NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities, 2015 Edition

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NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities, 2015 Edition
Item # 31815
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Chemical safety and emergency response demand the 2015 NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities.

The semiconductor industry is continually growing, requiring new safeguards to address evolving hazards. Completely reorganized and up-to-date with the latest coverage of technologies such as photovoltaics, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled -- containing a cleanroom or clean zone or both.

Chapters address every aspect of safety, from general safety precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress. This edition adds display panel and photovoltaic production to its scope, along with other major changes.

The 2015 NFPA 318 assists all stakeholders involved in fire protection: engineers, AHJs, facility personnel, and contractors.

This rewritten, clarified edition provides new definitions, identification of hazardous materials categories, and an introduction to Hazard Production Material (HPM) risk assessment. It also adds numerous new requirements addressing:

  • Hazardous materials
  • Liquid chemical storage and handling
  • Gas storage and handling
  • Production and support equipment
  • Waste treatment
  • Fire protection

Get the latest requirements for semiconductor fabrication facilities, in the most user-friendly format, in the 2015 NFPA 318. (Softbound, 35 pp., 2015)

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