NFPA 318

Search Results

Close

Standard for the Protection of Semiconductor Fabrication Facilities

This standard presents requirements to safeguard facilities containing cleanrooms from fire and related hazards to protect against injury, loss of life, and property damage. It applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing a cleanroom, or clean zone, or both.

Current Edition: 2018

Choose Edition:

Select the Free Access Edition:

View

Current & Prior Editions

Choose Edition:

Select Edition

Next Edition

Technical Committee

Ask a Technical Question

NFPA members and public sector officials may submit a question on an NFPA code or standard. Responses are provided by NFPA staff on an informal basis.
Happy Holidays! NFPA will be closed December 25 - January 1. We wish you all a safe & enjoyable holiday week and look forward to serving you in the new year.

NFPA 318: News & Research

News about NFPA codes and standards

View Purchase Options

Happy Holidays! NFPA will be closed December 25 - January 1. Place your orders by Wednesday, December 13 to ensure domestic delivery by year end. We wish you all a safe & enjoyable holiday week and look forward to serving you in the new year.

Related Products