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This standard presents requirements to safeguard facilities containing cleanrooms from fire and related hazards to protect against injury, loss of life, and property damage. It applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing a cleanroom, or clean zone, or both.
Requirements provide criteria for fire protection, ventilation and exhaust systems, construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, and product and support equipment. This document also covers emergency control station, means of egress, and emergency planning and response.
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© National Fire Protection Association (NFPA) 2016