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Standard for the Protection of Semiconductor Fabrication Facilities

This standard presents requirements to safeguard facilities containing cleanrooms from fire and related hazards to protect against injury, loss of life, and property damage. It applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing a cleanroom, or clean zone, or both.

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NFPA members and public sector officials may submit a question on an NFPA code or standard. Responses are provided by NFPA Technical Staff on an informal basis.

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